Diffractive Optical Elements (DOE)

Finisar provides Diffractive Optical Elements (DOE) for demanding industrial and consumer applications. DOEs are lithographically patterned and offer complete phase control of transmitted light without limitations imposed by refractive optics. A micron-thick active phase-transforming layer is directly etched into chemically inert dielectrics on robust fused silica substrate. An organics-free material platform is characterized by excellent reliability and can withstand harsh environmental conditions, high optical power and temperatures up to 500°C. Finisar DOEs undergo extensive quality assurance, have a proven reliability track record and are competitively priced.

Fabrication is based on robust deep ultraviolet (DUV) photolithography and a reactive ion etch process. Wafer-scale DOE optics are mass-produced using robust volume fabrication methods of the electronic IC industry and is easily scalable to multiple millions of micro-optical devices per year.

The method is suited for fabrication of high performance flat lenses, diffusers, structured light splitters, phase plates, beam splitters, pattern generators, computer generated holograms as stand-alone or arrayed components. There is no limitation on minimum component size, making it ideal for fabrication of micro-optical parts. Multiple optical functions, such as collimation and beam splitting, may be implemented in a single optical surface.

The approach may also be used for hybrid integration of a passive optical layer used for beam-shaping and an active layer, containing optical sources and detectors, for robust cost-effective implementation of optoelectronic light engines.

Finisar works with OEM customers to provide unique optical solutions based on Finisar diffractive optics. Contact diffractiveoptics [at] finisar.com for more details.