Finisar provides Diffractive Optical Elements (DOE) for demanding industrial and consumer applications. DOEs are lithographically patterned and offer complete phase control of transmitted light without limitations imposed by refractive optics. A micron-thick active phase-transforming layer is directly etched into chemically inert dielectrics on robust fused silica substrate. An organics-free material platform is characterized by excellent reliability and can withstand harsh environmental conditions, high optical power and temperatures up to 500°C. Finisar DOEs undergo extensive quality assurance, have a proven reliability track record and are competitively priced.
Fabrication is based on robust deep ultraviolet (DUV) photolithography and a reactive ion etch process. Wafer-scale DOE optics are mass-produced using robust volume fabrication methods of the electronic IC industry and is easily scalable to multiple millions of micro-optical devices per year.
The method is suited for fabrication of high performance flat lenses, diffusers, structured light splitters, phase plates, beam splitters, pattern generators, computer generated holograms as stand-alone or arrayed components. There is no limitation on minimum component size, making it ideal for fabrication of micro-optical parts. Multiple optical functions, such as collimation and beam splitting, may be implemented in a single optical surface.
The approach may also be used for hybrid integration of a passive optical layer used for beam-shaping and an active layer, containing optical sources and detectors, for robust cost-effective implementation of optoelectronic light engines.
Finisar works with OEM customers to provide unique optical solutions based on Finisar diffractive optics. Contact diffractiveoptics [at] finisar.com for more details.